Fully differential read-out circuitry components for MEMS-based accelerometers

机译：基于MEMS的加速度计完全差分读出电路组件

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摘要

This paper presents outcome of introductory works concerning feasibility study for design of MEMS accelerometer readout circuit based on fully-differential signal processing path.

机译：本文介绍了基于全差分信号处理路径的MEMS加速度计读出电路的可行性研究的介绍性工作的结果。

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《International Conference on Perspective Technologies and Methods in MEMS Design》|2018年|279p|共5页
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Mariusz Jankowski; Piotr Zajac; Andrzej Napieralski;
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中图分类 TM38-53;
关键词
Topology; Voltage control; Micromechanical devices; Accelerometers; Integrated circuit modeling; Switching circuits; Switches;

机译：拓扑;电压控制;微机械设备;加速度计;集成电路建模;开关电路;开关;

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1. Towards MEMS-based chem/bio sensing arrays with on-chip optical read-out [J] . Mariusz MARTYNIUK Przeglad Elektrotechniczny . 2015,第10期

机译：具有片上光学读出的基于MEMS的化学/生物传感阵列
2. Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate [J] . Chang SP, Allen MG Sensors and Actuators, A. Physical . 2004,第2期

机译：在不锈钢基板上集成电容式压力传感器和读出电路的演示
3. Low-noise multirate SC read-out circuitry for thermoelectric integrated infrared sensors [J] . Malcovati P., Leme C.A. IEEE Transactions on Instrumentation and Measurement . 1995,第3期

机译：用于热电集成红外传感器的低噪声多速率SC读出电路
4. Fully differential read-out circuitry components for MEMS-based accelerometers [C] . Mariusz Jankowski, Piotr Zajac, Andrzej Napieralski International Conference on Perspective Technologies and Methods in MEMS Design . 2018

机译：用于基于MEMS的加速度计的全差分读出电路组件
5. Development of a MEMS-based in-place inclinometer-accelerometer array for monitoring and evaluation of geotechnical systems. [D] . Bennett, Victoria Gene. 2010

机译：基于MEMS的就地测斜仪-加速度计阵列的开发，用于监测和评估岩土系统。
6. Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation [O] . Neal A. Hall, Murat Okandan, Robert Littrell, -1

机译：具有光学干涉读取和集成静电驱动的微机械加速度计
7. A Digital Output Accelerometer Using MEMS-based Piezoelectric Accelerometer Connected to Parallel CMOS Circuit [O] . Kobayashi Takeshi, Okada Hironao, Masuda Takashi, 2010

机译：使用基于MEMS的压电加速度计连接到并行CMOS电路的数字输出加速度计
8. Evaluation of MEMS-Based Wireless Accelerometer Sensors in Detecting Gear Tooth Faults in Helicopter Transmissions. [R] . Lewicki, D. G., Lambert, N. A., Wagoner, R. S. 2015

机译：基于mEms的无线加速度传感器在直升机传动齿轮齿故障检测中的应用。

Fully differential read-out circuitry components for MEMS-based accelerometers

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