Miniature MEMS Fabry-Perot interferometry pressure sensor and the fabrication system

摘要

Optical Fabry-Perot (F-P) fiber sensor is fascinating and widely used, especially in biological fields. Herewith a tiny F-P pressure sensor is built by micro electromechanical system (MEMS), of which the outer diameter is less than 300 micrometer. To assemble the sensor on the end of fiber, a special fabrication system is established based on machine vision technology. According to the experimental results, the sensitivity of F-P fiber sensor is about 1.3 nm/kPa, long time drift is about 5 nm, and the linearity error is less than 0.6 %.