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Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same
Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same
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机译:具有MEMS声传感器和其他MEMS传感器的系统和装置及其制造方法
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摘要
A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a substrate having a first surface and a second surface and wherein the first surface is exposed to an environment outside the MEMS device; and a MEMS microphone disposed at a first location on the second surface of the substrate and having a diaphragm positioned such that acoustic waves received at the MEMS microphone are incident on the diaphragm. The MEMS device also includes: a first integrated circuit disposed at a second location of the substrate, wherein the first integrated circuit is electrically coupled to the MEMS microphone; and a MEMS measurement device at a third location, wherein the MEMS measurement device comprises a motion sensor and a pressure sensor.
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