Combined Model-Free Decoupling Control and Double Resonant Control in Parallel Nanopositioning Stages for Fast and Precise Raster Scanning

摘要

A design of double resonant control combined with a model-free decoupling filter (MFDF) is presented in this paper. The design is demonstrated using the proposed MFDF to decouple a parallel multi-input multi-output (MIMO) system into several single-input single-output systems and applying a double resonant controller for vibration damping and cross coupling reduction in nanopositioners. Raster scan results of simulations based on an identified MIMO transfer function of a nanopositioning stage over an area of 4 μm × 0.4 μm with small RMS errors are demonstrated. Comparisons with using the double resonant controller alone show the effectiveness of the proposed controller.