Application of the streamlined body for properties amplification of thermoresistive MEMS gas flow sensor.

摘要

The main problems of the gas flow meters are the improvement of the sensitivity and velocity range, In this paper thermoresistive membrane gas flow sensor is considered. The sensor is based on the calorimetric principle of operation and developed for the thermal gas flow meters. Special streamlined body was used to improve sensor's characteristics. It is shown that streamlined body raises sensitivity by 2 times and improves velocity range of the sensor.