Design simulation and analysis of MEMS capacitive IDT devices using Multi-physics for Internet of Things (IoT)

摘要

This work focuses on the designing of inter-digitated capacitive device using COMSOL Multiphysics. The designed capacitive device consists of inter-digitated fingers capacitors (IDT) which increases the capacitance of the device proportionally to the number of fingers. The IDT configuration can be utilized for various types of applications such as accelerometer, gyroscope etc. The designed IDT focuses on a general capacitive IDT design that can be altered to fit any application. Response of IDT has also been analyzed. These IDT devices can be an essential component for sensors employed in IoT (Internet of Things).