Readout interface for capacitive MEMS microphone in CMOS technology

摘要

This paper presents the frontend part of the readout interface for a capacitive MEMS microphone designed and fabricated in 0.35 μm CMOS technology. The developed readout interface will be used in a noise dosimeter applicable in very noisy and harsh environment. The prototype chips were measured and the main parameters evaluated. The achieved results demonstrate low harmonic distortion, low noise and high dynamic range of the developed readout interface.