The present invention relates to a method for manufacturing a MEMS capacitive microphone and a MEMS capacitive microphone manufactured by the same. According to the present invention, a movable comb finger attached to a diaphragm and a fixed comb finger attached to a support are automatically aligned to enlarge a sensing area and make a gap between the movable comb finger and the fixed comb finger small and uniform. Therefore, the MEMS capacitive microphone with a high signal-to-noise ratio can be realized.
展开▼
