Realization of 1 million pixel charge transfer type ion image sensor with 12 µm pixel pitch

摘要

An advanced charge transfer type hydrogen image sensor consisting of 1024 × 1024 pixels with 12.1 µm pixel pitch, which contains the most pixels to date and half pitch compared to previous works, was fabricated. The new pixel layout of common ID electrodes and partition scanning system were designed for high-density image element (12.1 µm) and preventing a readout lag time. The pH sensitivity is 29.8 mV/pH using standard pH solutions. All 1024 × 1024 pixels are capable of measuring hydrogen ions, as demonstrated in the video of the hydrogen ion movement on the new sensor chip. To realize the high-density array sensor, observance of various movements of a cell can perform.