Functional MOEMS packaging with optical position feedback

摘要

This paper reports a novel integration concept of an optical position feedback and driver unit for MOEMS scanner mirrors. The optical feedback scheme is based on a quadrant diode with a central hole. A compact PCB-based module was realized, which combines all necessary electrical, optical and mechanical aspects using existing manufacturing technologies. These modules provide a functional MOEMS packaging, which can be realized within short time at a minimum cost.