首页> 外文会议>International Conference on Solid-State Sensors, Actuators and Microsystems >Design and fabrication of curved silicon image planes for miniature monocentric imagers
【24h】

Design and fabrication of curved silicon image planes for miniature monocentric imagers

机译:微型单中心成像仪的弯曲硅像面的设计与制造

获取原文

摘要

We introduce the design and fabrication of a segmented, hemispherical silicon image plane for 10 mm-diameter spherical monocentric lens. In order to conform to the spherical focal plane of the lens, we create flexible gore patterns consisting of spring-connected silicon hexagons. Mechanical functionality is demonstrated by assembling 20 µm-thick, patterned silicon gores into a curved test fixture. We have also fabricated and tested a photodiode array in a CMOS compatible process. The hemispherical imager will enable a compact 160° field-of-view camera with a fill factor over 80% using a single spherical lens.
机译:我们介绍了用于直径为10 mm的球面单心透镜的分段半球硅像面的设计和制造。为了符合透镜的球面焦平面,我们创建了由弹簧连接的硅六边形组成的柔性戈尔图案。通过将20 µm厚的带图案的硅丝组装到弯曲的测试夹具中,可以证明机械功能。我们还以CMOS兼容工艺制造并测试了光电二极管阵列。该半球形成像器将使紧凑型160°视野摄像机能够使用单个球形透镜实现80%的填充率。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号