The Behavior of C-axis-aligned A-b-plane-anchored Crystal (CAA Crystal)

摘要

A c-axis-aligned crystalline InGaZn oxide, CAAC-IGZO, which we have developed in 2009 has a layered structure of (Ga, Zn)O layers and InO_2 layers with c-axis alignment, and has no clear grain boundaries. We propose a deposition model in which nanocrystals (pellets) with a (Ga, Zn)O/InO_2/(Ga, Zn)O structure that are ejected from a target by sputtering are arranged on the deposition surface. The results of the first-principles calculations suggest that atomic particles promote lateral growth of the pellets.