Studies on H2O-based Al2O3 deposited on as-grown CVD graphene

摘要

In this paper, graphene films were synthesized by chemical vapor deposition. Raman spectra and transmission electron microscope indicated the graphene films were few-layer. Al2O3 films were grown directly onto the surface of graphene transferred on SiO2/Si by H2O-based atomic layer deposition method. Experiments revealed that the distribution of physically adsorbed H2O molecules on the surface of graphene decided the morphology of Al2O3 film, and the O/Al ratio was close to stoichiometric condition of 1.5.