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A Novel Trans-scale Precision Positioning Stage Based on The Stick-slip Effect

机译:基于粘滑效果的新型跨尺度精密定位阶段

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This article is focus on developing a novel transscale precision positioning stage based on the stick-slip effect. The stick-slip effect was introduced and the rigid kinematics model of the stick-slip driving was established. The forward and return displacement equations of each step of the stick-slip driving are deduced. The relationship of return displacement and the acceleration produced by friction was obtained by displacement equations. Combining with LuGre friction model, the flexible dynamics model of the stick-slip driving was established and simulated in Simulink software. Simulation results shows that the return displacement will reduce with the acceleration of slider produced by dynamic friction force, the rigid kinematics model was also verified by simulation results. The testing prototype of the stage driving by stick-slip effect was designed and the movement parameters of forward and reverse direction was tested, the results of simulation was verified by the testing datas. However, a problem of the difference net displacement of forward and reverse movement was proposed.
机译:本文专注于基于粘滑效果开发新型跨极精密定位阶段。介绍了粘滑效果,建立了粘滑驾驶的刚性运动学模型。推导出粘滑驱动的每个步骤的向前和返回位移方程。通过位移方程获得返回位移和摩擦产生的加速度的关系。结合Lugre摩擦模型,在Simulink软件中建立和模拟了粘滑驱动的柔性动力学模型。仿真结果表明,随着动态摩擦力产生的滑块加速度,返回位移将减少,刚性运动学模型也通过模拟结果验证。设计了通过粘滑效果驱动的舞台的测试原型,并测试了向前和反向方向的运动参数,通过测试数据验证了模拟结果。然而,提出了向前和反向运动的差异净移位问题。

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