Design of micromachined self-focusing piezoelectric composite ultrasound transducer

摘要

Based on the Fresnel half-wave band interference, a micromachined self-focusing piezoelectric composite ultrasound transducer was proposed in this paper. The theoretical analysis was deduced based on the concept of constructive interference of acoustic waves and electromechanical response of piezoelectric composites. The calculated and simulation results showed that it combined the advantages of composite transducer and plate self-focusing transducer, and can achieve high electromechanical coupling coefficient, low acoustic impedance, high intensity, short focal length and micro size. Because it was based on the micro-electromechanical systems, the fabrication process was accurate and controllable, which made it have good potential for interventional ultrasound imaging, cellular microstructure imaging, skin cancer detection and industrial nondestructive testing applications.