Microano technology challenges and training opportunities

摘要

The modern microano technology (MNT) challenges require new engineering knowledge and skills. In micro-engineering and micro-systems technologies most of the product developments are material or process centred. However, most of the available engineering materials for MNTs and Micro-Electro-Mechanical systems (MEMS) processes will not be able to meet the manufacturing demands for 3D high-aspect-ratio nano/micro structures and high precision. Thus, to broaden the range of micro-engineering products the introduction of new specific materials is necessary as well as study of the process capabilities that are reasonably compatible with the batch-fabrication.