Design and characteristic study of large torque micro-nano platform based on piezoelectric stack

摘要

With the development of precision engineering and precision instruments, the micro-nano platform becomes the important carrier in the precision positioning technology, which provides large torque and high precision. In this paper, a kind of large torque micro-nano platform is designed and created, which apply piezoelectric stack and triangle amplification principle. Theoretical analysis calculates the displacement amplification of drive mechanism and the displacement and stress variation of platform. The platform's performance is tested by using laser displacement meter. Four kinds of testing are applied in this paper, including static displacement output test, repeated precision test, stability test, and dynamic state characteristic test. The testing data shows that the micro-nano platform can provide large output displacement stably and quickly, and it has very strong practical. In the same time, the testing conclusions show the bad influence from the hysteresis and creep deformation of piezoelectric material and mechanism. So the next step is necessary to research the drive and control of this platform for amplifying its practicability in the future.