Focused femtosecond laser pulses: A versatile tool for three-dimensional writing of micro-nano devices

摘要

Femtosecond laser microfabrication is a versatile method able to form surface ablated features in any material, buried waveguides and microchannels in transparent glasses, and 3D microstructures in photoresists via two photon polymerization. In this paper, we describe the fundamentals of each of these three important modalities of the femtosecond laser micromachining method and present several novel devices that have application in lab on a chip, biosensing and display industries.