Tunable transimpedance sustaining-amplifier for high impedance CMOS-MEMS resonators

机译：用于高阻抗CMOS-MEMS谐振器的可调跨阻维持放大器

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This paper presents a full-custom tunable gain transimpedance amplifier (TIA) designed to work as a sustaining amplifier for a monolithic CMOS-MEMS oscillator. Based on a capacitive detection of the MEMS current, the implemented differential structure allows to compensate a wide range of motional resistances (between 1.4MΩ to 20MΩ) exhibiting an exceptional low input current noise of 32fA/√Hz @ 20 MHz.

机译：本文提出了一种完全定制的可调增益互阻放大器（TIA），该放大器设计用作单片CMOS-MEMS振荡器的维持放大器。基于对MEMS电流的电容式检测，所实现的差分结构可补偿宽范围的运动电阻（在1.4MΩ至20MΩ之间），在20 MHz时表现出极低的32fA /√Hz输入电流噪声。

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《Conference on Ph. D. Research in Microelectronics and Electronics》|2014年|1-4|共4页
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Sobreviela G.; Uranga A.; Barniol N.;
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CMOS-MEMS; MEMS-based Oscillatorr; Radio-Frequency MEMS;

机译：CMOS-MEMS;基于MEMS的振荡器射频MEMS;

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Tunable transimpedance sustaining-amplifier for high impedance CMOS-MEMS resonators

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