Research on Ultrasonic Cleaning Technology of Optical Components

摘要

Along with the higher demand of super smooth optical surface, the cleaning technique that is the critical process to obtain super smooth surface has to meet even higher standards. In virtue of higher efficiency and better effect, the ultrasonic cleaning technology has been widely used in cleaning high-end optical lenses. This paper introduced the process, principle and method of the ultrasonic cleaning technology for a super smooth surface. The basis of determining the main technical parameters, such as the power and frequency of ultrasonic wave, the ultrasonic time, the components of cleaning agent and its operating temperature, were also discussed. In addition, the progress situations of ultrasonic cleaning technologies including the characteristics of complex frequency ultrasonic and megasonics cleaning technology and the removal mechanism of different granularity of dirt were analyzed. The mechanism of complex frequency ultrasound produces chemical process and the relationship between megasonics boundary layer and the particles removing were studied. Results showed that the chemical functions of complex frequency ultrasound and megasonics were better than that of single frequency ultrasound for the particles removal effect. Therefore, the new complex frequency ultrasonic and megasonic cleaning technologies are very necessary for cleaning optical components.