METHOD AND APPARATUS FOR CLEANING OPTICAL COMPONENT, AND METHOD AND APPARATUS FOR SPIN-DRYING OPTICAL COMPONENT AFTER CLEANING, AND OPTICAL COMPONENT HOLDING PARTS

摘要

PROBLEM TO BE SOLVED: To provide a method for cleaning etc. a number of magnetized optical components, such as garnet at a single sitting, with which they are cleaned to be in a proper condition for satisfactorily functioning as a module, when used for a module such as an isolator.;SOLUTION: In this cleaning method, very clean optical components with no magnetic particle are obtained in a single setting, in large quantities and at a low cost by arranging magnetized, or to be magnetized, optical components and a magnet so as to face each other, ultrasonic cleaning the optical components in the magnetic field and spin-drying them.;COPYRIGHT: (C)2007,JPO&INPIT