Increasing the sensitivity of Love wave sensors with thicker waveguide layer by modified spin coating method

摘要

A modified spin coating method is utilized to prepare waveguide layers of Love Wave devices. The thickness of PMMA waveguide layer up to 3.0 um is obtained with a smooth surface. The properties of these sensors, such as, mass sensitivity, insertion loss are studied as a function of layer thickness. Mass sensitivity up to 705cm~2g~(-1) is demonstrated.