Process Reliability Data Comparison Guidance and Practise in Advanced Semiconductor Manufacturing Quality Control

摘要

This paper introduces a guidance, which is displayed by a flow chart, for the process reliability data comparison of advanced semiconductor technologies. The present semiconductor manufacturing process is very complex and its quality control requirement also becomes more and more strict. Different reliability data may analyzed by different methods considering both engineering and statistical evidence so we can best assess process reliability performance not only considering the lifetime requirements. Engineering comparison method is based on fitting the reliability data with proper distribution or lifetime model and comparing the lifetime at a specified condition with 95% confidence band. We apply F-T test for two groups data and one-way ANOVA for multi-groups statistical comparisons. Practical examples are given to illustrate our proposed guidance flow.