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A Drain-side Gate-underlap I-MOS (DGI-MOS) transistor as a label-free biosensor for detection of charged biomolecules

机译:漏极侧栅极下重叠I-MOS(DGI-MOS)晶体管作为无标签生物传感器,用于检测带电生物分子

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Electronic devices are finding increasing application as biosensors for the label-free detection of biomolecules. These biosensors offer the advantage of fast detection and compatibility with existing CMOS processes that enable rapid commercialization, and achieve very low detection limits. A biosensor's sensitivity is one of the main factors determining its performance. The application of emerging steep sub-threshold devices as biosensors is being actively explored due to their ability to provide very high sensitivities. In this paper, we propose the application of a Drain-side Gate-underlap Impact-ionization MOS (DGI-MOS) transistor as a sensor for label-free detection of charged biomolecules. The DGI-MOS biosensor is implemented by introducing an underlap in the gate electrode over the channel region at the drain side. The underlap serves as the location for the immobilization of biomolecules. With TCAD simulations, we demonstrate the proposed DGI-MOS biosensor to have a high sensitivity to the presence of charged biomolecules. In addition, the threshold voltage (V) shift observed due to the presence of biomolecules is observed to be significantly higher than the other reported steep sub-threshold device-based biosensors. We demonstrate that the DGI-MOS biosensor allows the underlap region length to be comparable with the gate electrode length, simplifying the manufacturing steps involved in creating the underlap region.
机译:电子设备作为生物传感器正越来越多地用于生物分子的无标记检测。这些生物传感器具有快速检测和与现有CMOS工艺兼容的优势,可实现快速商业化并实现极低的检测限。生物传感器的灵敏度是决定其性能的主要因素之一。由于新兴的陡峭亚阈值设备具有很高的灵敏度,因此正在积极探索将其作为生物传感器的应用。在本文中,我们提出了将漏极侧栅极-底下碰撞电离MOS(DGI-MOS)晶体管作为传感器进行无标签检测带电生物分子的应用。 DGI-MOS生物传感器是通过在漏极侧的沟道区域上方的栅电极中引入下重叠来实现的。重叠部分用作固定生物分子的位置。通过TCAD仿真,我们证明了提出的DGI-MOS生物传感器对带电生物分子的存在具有很高的敏感性。另外,观察到由于存在生物分子而观察到的阈值电压(V)偏移明显高于其他报道的基于陡峭亚阈值设备的生物传感器。我们证明了DGI-MOS生物传感器允许下重叠区的长度与栅电极的长度相当,从而简化了创建下重叠区的制造步骤。

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