The transparent film calcium zinc oxide with indium doping was prepared by spray pyrolysis with calcium nitrate, zinc acetate and indium nitrate precursors. With the increasing of calcium nitrate concentration, the blue shift of cutoff wavelength in the film transmission spectra can be observed. The optical bandgap for ZnO:In and CaZnO:In thin films were 3.34 and 3.41 eV, respectively. N-type conduction was observed for the indium doped thin films. With the increasing of indium nitrate concentration, the film conductivity, concentration and mobility were characterized. The indium doped CaZnO thin film shows the talent performance in the application of high band gap transparent conducting film.
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