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High Temperature Furnace for Liquid Phase Epitaxy of Silicon Carbide in Microgravity

机译:微型碳化硅碳化硅液相外延高温炉

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The high temperature furnace for Liquid Phase Epitaxy (LPE) was developed by Swedish Space Corporation. It was developed for a Silicon Carbide liquid phase epitaxy microgravity experiment performed by Linkoping University, Sweden. The LPE is capable of processing materials up to 1900 °C in an ultra clean atmosphere or vacuum in accordance with requirements for semiconductor crystal growth. The LPE has the capability to heat and cool the samples rapidly due to a high power input and a cooling gas system, this makes it possible to utilise it for short duration microgravity flights. The samples can be processed in isothermal conditions or with a temperature gradient up to 5 °C/mm. The two resistive heaters are controlled individually which makes it possible for the user to pre-program an optional temperature profile for the experiment. The LPE was launched on the Swedish microgravity rocket MASER 7 at Esrange in May 1996. For the first time under microgravity conditions four SiC samples where processed successfully. SiC has in comparison with Si superior properties regarding power electronics [1]. However, the quality of the material needs to be improved considerably before commercial production. Growth from a solution may give rise to an impurity microsegregation and growth instabilities due to the gravitation-induced convection, presumably resulting in an alteration of the point defect assembly. Growth under microgravity is thus a key for a better understanding of the growth process and defect formation. The material grown in microgravity is improved compared with on-ground reference growth.
机译:瑞典空间公司开发了液相外延(LPE)的高温炉。它是由瑞典林门林大学进行的碳化硅液相外延微匍匐微争问实验开发的。 LPE能够根据半导体晶体生长的要求,在超清洁气氛或真空中加工高达1900°C的材料。 LPE具有由于高功率输入和冷却气体系统而快速地加热和冷却样品的能力,这使得可以利用它来用于短持续时间的微普度飞行。可以在等温条件下或高达5℃/ mm的温度梯度加工样品。两个电阻加热器被单独控制,这使得用户可以预先编程用于实验的可选温度曲线。 LPE于1996年5月在Esrange在Esrange在Esrange启动的。在微匍匐条件下首次在成功处理的四个SiC样本下。 SIC与SI卓越特性相比,电力电子技术[1]。然而,在商业生产之前需要提高材料的质量。由于引力引起的对流,溶液的生长可能引起杂质微量测定和增长不稳定性,可能导致点缺陷组件的改变。因此,微重力下的增长是更好地理解生长过程和缺陷地层的关键。与地面参考生长相比,在微匍匐中生长的材料得到改善。

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