Effects of controlled formation of magnetic domains in patterned permalloy thin films on RFIC spiral inductors

摘要

In recent research works on magnetic thin films for RFIC Spiral Inductors it has been shown that patterning magnetic material improves the performance of inductors. In this paper it is presented that controlled formation of magnetic domains in patterned Permalloy thin films plays a vital role in boost of inductance and quality factor of spiral inductors.