Comparison of the effects of 60 nm and 96 nm thick patterned permalloy thin films on the performance of on-chip spiral inductors

摘要

In our earlier work it was shown that the 60 nm domain patterned Permalloy, incorporated on on-chip spiral inductors, gave better performance at frequencies greater than 5 GHz compared to the bulk Permalloy incorporated inductors, and the control structure. In this paper we compare the effects of 60 nm and 96 nm thick domain patterned Permalloy thin films, on the performance of on-chip spiral inductors. Experimental results show that the 60 nm thick both bulk and patterned Permalloys provide more improvement in inductance and quality factor of inductors, compared to that of 96 nm.