PreparatiPreparation of a Wafer-level Micro Polymer Lens Array With Improved Performance Using a Low Cost Glass Mold

摘要

In our work, polymer-based micro lens arrayswith spacers were innovativly fabricated by low costwafer-level glass-silicon molds. The upper glass mold wasprepared by a well-controlled hot forming process (HFP)combined with a chemical foaming process (CFP). Theunder silicon mold was formed by an etching process.Before dispensing UV-curable glue between the twoconcave molds, the contact surface should be coated withan anti-stick layer. After UV curing and de-molding, themicro lens arrays were successfully fabricated. The lenseswere inspected by an atomic force microscope(AFM), awhite light interferometer and a beam analyzer. Theresults demonstrate the excellent quality of surfaceroughness and optical characteristics. This study indicatesthe potential of this novel molding process for industrialproduction.