SENSORS MICROPROCESSING BY LASER DIRECT PATTERNING (LDP) FOR INDUSTRIAL PRODUCTION

摘要

The newly developed mask projection process, called Laser Direct Patterning (LDP) is a process for the high volume production with conductive and reflecting sensors. Due to its simple process mechanism it combines precision and economic efficiency. Depending of material, sensors and sensor elements of thin metal films with lines and spaces < 15 m are producible. The paper present the principle of laser ablation of thin metal on polymer substrate, also represented the systems engineering and is described the selected applications of this technology for industrial manufacturing.