Production and Characterization of Bi_2O_3-WO_3-TeO_2 thin films with Au nanoparticles for applications with micro and nanoelectronic devices

摘要

In the present work we report the production and characterization of Bi_2O_3-WO_3-TeO_2 (BWT) thin films with Au nanoparticles. RF co-sputttering technique was used for the deposition of the amorphous films on substrates. A target of BWT was RF-sputtered simultaneously with pure Au target using argon plasma; O_2 flow was also used in order to replenish oxygen of BWT lost in process. Nucleation was obtained by means of heat treatment and also using heat treatment together with ultraviolet irradiation. Elipsometry, perfilometry, X-ray fluorescence, transmission electron microscopy, atomic force and optical absorption technique were used to evaluate the applications for micro and nanoelectronic devices.