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Fabrication and Characteristics of Double-Gated Field Emitters with Thick Extraction Gate Electrode

机译:厚提取栅电极双门控场发射器的制造和特性

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Spindt-type field emitters have a relatively wide emission angle of about 30 degree. To realize an ultra-fine field emission display (FED), focusing electron beam is necessary for avoiding crosstalk. Double-gated field emitters with a focus gate electrode are a promising emitter, because electron beam can be relatively easily focused in symmetric shape. However, the emission current is drastically reduced due to the influence of the lower potential of the focus gate electrode than that of the extraction gate electrode [1]. Figure 1 shows the simulation result of the dependence of the electric field at the top of the emitter tip on the thickness of the extraction gate electrode. In the simulation, the bias voltages of the focus electrode and gate electrode were 57 and 70V, respectively. Both apertures of the focus and gate electrodes were 1μm. As shown in Fig.2, the electric field at the tip decreases when the lower potential than that of the gate electrode is applied to the focus electrode. However, the electric field increases with increase of the gate thickness, due to the shielding effect of the thick gate electrode. At the gate thickness of 1μm, the electric field recovers the initial field strength without operation of the focus electrode.
机译:Spindt型场发射器具有约30度的相对较宽的发射角度。为了实现超细场发射显示器(FED),对于避免串扰是必要的聚焦电子束。具有聚焦栅电极的双门式场发射器是有希望的发射器,因为电子束可以相对容易地聚焦在对称形状中。然而,由于焦栅电极的较低电位的影响,发射电流大大减小了比提取栅电极的较低电位的影响[1]。图1示出了发射极尖端顶部的电场在提取栅电极的厚度上的依赖性的仿真结果。在模拟中,聚焦电极和栅电极的偏置电压分别为57和70V。焦点和栅电极的两个孔为1μm。如图2所示,当倾斜的电场在较低的电位上施加到焦电极的较低电位时减小。然而,由于厚栅电极的屏蔽效果,电场随着栅极厚度的增加而增加。在1μm的栅极厚度下,电场恢复初始场强而无需焦电极的操作。

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