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High Temperature Field Evaporation of Tantalum Emitter

机译:钽发射器的高温场蒸发

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High temperature field evaporation of Ta emitter was studied by means of magnetic atom probe with mass resolution ~200 at the temperatures T from 300 K to 2500 K. The instrument contains the unique source of field ions with focusing, not depending on a value of field strength F. At the room T only three-charged ions Ta{sup}+3 are observed. Increasing T leads to necessary reduction of value evaporation field F{sub}(ev) that causes change the charge of the evaporated ions. At the more high temperature T > 500 K dominate already two-charged ions Ta{sup}+2. From to temperature T = 1950 K in interval T = 1950 - 2350 K single-charged ions Ta{sup}+ are observed too. At the T > 1900 K two-charged ions vastly dominate, velocity of their evaporation V ~5 pul/sec then values V for single and three-charged ions V ~0.1 - 0.3 pul/sec. Two and three-charged ions exist with different intensity in all interval T, single-charged ions exist at high T only.
机译:通过磁性原子探针研究了Ta发射器的高温场蒸发,该磁性原子探针在300k至2500k的温度下的质量分辨率〜200。该仪器包含具有聚焦的独特田间源,而不是根据场的值强度F.在房间T,只观察到三充电的离子Ta {Sup} +3。增加T导致有必要的值蒸发领域F {sub}(EV),其导致蒸发离子的电荷改变。在较高的温度下,T> 500k主导已有两个带电离子Ta {sup} +2。从温度t = 1950k间隔t = 1950 - 2350k,也观察到单电带电离子Ta {sup} +。在T> 1900k双电离子大大主导,蒸发速度V〜5脉冲速度,然后为单个和三电荷的离子V〜0.1- 0.3脉冲的值V。在所有间隔T中具有不同强度的两个和三次带电的离子,单电冷离子仅存在。

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