Direct and all-dry fabrication of paper-based microfluidic device using parylene-C deposition and maskless microplasma writing

摘要

This paper reports a novel and simple method for direct and all-dry fabrication of paper-based microfluidic devices using parylene-C deposition and maskless atmospheric pressure microplasma writing. Microplasma jet with diameter of about 10 μm was demonstrated to investigate the feasibility of this method in this paper and well defined hydrophilic-hydrophobic contrast channels are fabricated. By controlling the diameter of the microplasma jet and the treatment time, the channel width and wettable depth can be tuned.