In this paper, we present a two-dimensional (2D) electrostatically actuated Micro-Electro-Mechanical System (MEMS) resonant microscanner for a miniature dual axes confocal fluorescence endomicroscope with an outer diameter (OD) of 5 mm, in which the scanner will be used to achieve a large field of view (FOV) in real-time for enface imaging. The device has a compact and robust gimbal structure design, which enables a reflective mirror with high fill-in factor to perform high-speed 2D scanning with large tilting angles. Devices with a good optical quality mirror surfaces are produced using a three-step deep reactive-ion etching (DRIE)" silicon-on-isolator (SOI) micromachining process on a single wafer with three masks.
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