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Dual comb electrode structure with spacing for increasing a driving angle of a microscanner, and the microscanner adopting the same
Dual comb electrode structure with spacing for increasing a driving angle of a microscanner, and the microscanner adopting the same
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机译:具有间隔的双梳状电极结构以增加微扫描器的驱动角度,并且采用该结构的微扫描器
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摘要
A dual comb electrode structure with spacing for increasing a driving angle of a micro mirror provided by MEMS (Micro-Electro-Mechanical system) structure and a microscanner adopting the same are provided. The dual comb electrode structure includes: a mirror unit for reflecting light; a plurality of movable comb electrodes protruded in both sides of the mirror unit; and a plurality of upper and lower static comb electrodes formed above and below the movable comb electrode so as to be alternated with the plurality of movable comb electrodes formed in both sides of the mirror unit, wherein a spacing between the upper static comb electrode and the movable comb electrode is different from a spacing between the lower static comb electrode and the movable comb electrode.
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