The Braille code display device with a PDMS (polydimethylsiloxane) membrane and thermopneumatic actuator is fabricated and tested. One dot (pixel) whose dimension is 3mm×3mm among six dots in the Braille code is fabricated by using RIE (reactive ion etching), chemical wet etching, and E-beam evaporating. When applied input voltage is under 6V{sub}(pp), the deflections of the membranes occur under the thickness of the silicon substrate. On the other hand, when 8V{sub}(pp) and 10V{sub}(pp) are applied at 40μm and 110μm thickness membranes, the deflections happen about 1mm, 0.4mm, 1.3mm, and 1.4mm over the substrate, respectively. The deflection of fabricated device is accomplished over 2 times larger than 600μm standard height designated by Korea Blind Union.
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