Measuring system for determining thermal parameters of semiconductor devices

摘要

In the paper the measuring system, elaborated by the authors, for determining thermal parameters of semiconductor devices with the use of electrical methods, is presented. The concept of operation of the system and a sample circuit solution dedicated for measurements of diodes are described. Correctness of the system's operation was verified by comparing the results of transient thermal impedance measurements of the silicon Schottky diode and the silicon carbide MPS diode, obtained through the developed measuring system and pyrometric method.