A MEMS platform for the dielectrophoretic and thermoelectric characterization of Bi2Te3 nanowires

摘要

We demonstrate the fabrication and use of our second generation Thermoelectric Nanowire Characterization Platforms (TNCP). The design of this TNCP results from an extensive experimental study on dielectrophoretic (DEP) nanowire manipulation and placement on a DEP test structures. These TNCPs fabricated with optimally designed DEP electrodes have enhanced the nanowire assembly yield up to 90%. As a practical application, measurements of electrical conductivity (σ) and Seebeck coefficient (S) of an individual Bi2Te3 NW are reported. Finally, another novel method for NW assembly is introduced, using an optical tweezers.