MEMS microphone with 73dBA SNR IN A 4mm x 3mm x 1.2mm Package

摘要

This paper reports on the development of a conventional constrained-diaphragm capacitive MEMS microphone that outperforms the highest performing MEMS microphones available in the market today. The design concept is to minimize MEMS acoustic damping losses to improve the signal-to-noise-ratio (SNR) using the finite-element analysis (FEA) to study the effect of different MEMS parameters on damping. The architecture is very simple and standard silicon-based processes are used for MEMS fabrication. With optimization, 73dBA SNR and −34dBV/Pa sensitivity has been achieved and very good correlation between simulated and measured frequency response and noise spectrum has been demonstrated.