A Low Power 4-Channel Single-Cantilever Metal-Oxide Gas Sensor Cell with Gas Identification Capability

摘要

This paper presents a low power 4-channel metal-oxide (MOx) gas sensor cell based on a single cantilever, which shows gas identification capability. The cantilever sensor cell was designed and fabricated using MEMS technology, and SnO2 was deposited by sputtering as the sensing layer. Based on the temperature distribution of the cantilever, the four channels have different operating temperatures under a common input heating voltage. All channels show responses to 50 ppm C2H5OH, H2, and NH3 with a total power consumption of 8.55 mW. The response characteristics of the four channels are different under the same input heating voltage, and the response change trend of each channel is also different with different target gas as the input heating voltage changes.