Investigation of pre-ionization and atmospheric pulsed discharge plasma

摘要

A generation method of pre-ionization atmospheric pressure discharge plasma has been many studied for pulse gas lasers. On the other hand, the dielectric barrier discharge is often used to generate ozone. In this study, investigation of pre-ionization discharge studied about dielectric barrier discharge for pre-ionization. The pre-ionizing electrode configuration is wire-dielectric-plate. The insulating material for the barrier discharge is made of aluminum oxide (Al2O3) and thickness is 1.5 mm. Relative permittivity εr of the aluminum oxide is about 10. The wire electrode is made of stainless steel with 0.8mm diameter. In addition, the plate electrodes are made of stainless steel as well. We have caused the barrier discharge to be used for pre-ionization by applying a pulsed voltage between the wire and the plate. And we are generation main discharge after pre-ionization. The main discharge electrode configuration is wire-plate without dielectric barrier. We have caused the main discharge by applying high voltage pulsed power between the wire and another plate. We have observed propagation of the discharge plasma with pre-ionization per 10 ns using a framing camera. As a result of the observation of the framing camera, the plasma with pre-ionization could recognize spread phenomena compared to the normal discharge without pre-ionization. We have developed ozonizer using the pre-ionizing discharge system.