EXCIMER OR MOLECULAR FLUORINE LASER AND DEVICE INTENDED FOR UV PRE-IONIZATION OF ACTIVE VOLUME OF ELECTRIC DISCHARGE REPETITIVELY PULSED GAS LASER

摘要

PROBLEM TO BE SOLVED: To prolong the useful life of mixture gas or the components of a discharge system by improving the laser output parameters.;SOLUTION: A device for use with a repetitively pulsed gas laser provides self-initiated UV preliminary ionization of the active volume of a laser, which has extended high-voltage and grounded electrodes 12 disposed parallel to one another, to which peaking capacitors 14 distributed along the length of the electrodes are connected in a low inductance manner. The low-voltage contacts of the peaking capacitors are either connected directly to the grounded electrode or, if this connection is interrupted, dielectric plates are inserted that are disposed on one side or on both sides of the grounded electrode. If the capacitors 15 are charged rapidly, a surface discharge which effects UV pre-ionization of the volume of the main discharge and is uniformed distributed over the whole surface of the dielectric plates is produced on the surface of the dielectric plates.;COPYRIGHT: (C)2002,JPO