Research on Synchronization Control Algorithm of Gantry-Type Motion Platform Based on IC Package

摘要

As global semiconductor gradually develop into the post-Moore era, the status of microelectronic packaging technology in the IC industry is becoming increasingly prominent, and the requirements for high precision and high speed of microelectronic packaging equipment are also increasing. The gantry type motion platform is widely used in chip packaging. However, due to the mechanical coupling of the beam between the two linear motors of the gantry type motion platform, the system positioning accuracy and synchronization performance are seriously affected. In this paper, a self-made gantry motion platform is taken as the research object, and a cross-coupling synchronization algorithm based on fuzzy feedforward controller is proposed to realize the synchronous control of the system, including a fuzzy feedforward controller and a compensation controller based on cross-coupling principle. The cross-coupling controller takes the speed difference of two linear motors as the input signals, which compensates to the speed loop after being adjusted by the PI controller. The simulation results show that the crosscoupling synchronization algorithm based on fuzzy feedforward control can ensure the positioning accuracy, the response speed is faster, the anti-interference ability is stronger, and the synchronous follow performance is good, which basically meets the high-speed and high-precision requirements of the microelectronic packaging industry.