Fabrication of the Micromachined Poly-dimethylsiloxane Pyramidal Tips Arrays for Biotechnology Packaging Applications

摘要

This article presents a simple, non-toxic, and low-cost tips arrays made of poly-dimethylsiloxane pyramidal material, which is expected to have a large-scale application in the future civil biomedical field. A layer of silica and silicon nitride are grown on the silicon wafer as a corrosion mask by thermal oxygen and low pressure chemical vapor deposition process, sequentially. After lithography process, the wafer is wet-etched by potassium hydroxide etchant, and the sharpness of the deep notches can be controlled by controlling the time of corrosion. And then the poly-dimethylsiloxane is poured and filled in a vacuum. By adjusting the vacuum, pouring temperature and time, to achieve poly-dimethylsiloxane defect-free filling. Through the process optimization, to strip the poly-dimethylsiloxane from the deep notches. The quality of the tips are tested and characterized by step meter, optical microscope, as well as scanning electron microscope, and the results show that the stripping effect is very good, and there is no burr on the surface of the poly-dimethylsiloxane pyramidal tips arrays and no other flaws.