Ultraprecise positioning mechanism with 3-DOF over a one- millimeter stroke using monolithic flexure guide and electromagnetic actuator

机译：使用单片式挠性导轨和电磁致动器，在1毫米行程内具有3自由度的超精密定位机构

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A new mechanism is introduced by integrating monolithic flexure mechanisms, and the performance of the mechanism is discussed. Ultra-precise circular motion with 1 mm diameter is achieved with 8.2 nm (P-V value) deviation from circularity.

机译：通过集成整体式挠性机构引入了一种新的机构，并讨论了该机构的性能。圆度偏差为8.2 nm（P-V值）时，可以实现直径为1 mm的超精密圆周运动。

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《International conference of the European Society for Precision Engineering and Nanotechnology》|2013年|216-219|共4页
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S. Fukada; T. Matsuda; Y. Aoyama; T. Kirihara;
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1. Modelling and Control of Flexure Mechanism Driven by Electromagnetic Linear Motors for Ultraprecise Continuous Path Positioning over a One-Millimetre Stroke [J] . Shigeo Fukada, Kentaro Nishimura, Tomoaki Matsuda International journal of automation technology . 2011,第6期

机译：电磁线性电机驱动的挠曲机构的建模和控制，以实现一毫米行程内的超精确连续路径定位
2. Optimal design of a piezo-actuated 2-DOF millimeter-range monolithic flexure mechanism with a pseudo-static model [J] . Ling Mingxiang, Cao Junyi, Jiang Zhou, Mechanical systems and signal processing . 2019,第JANa15期

机译：具有伪静态模型的压电驱动2自由度毫米范围整体式挠性机构的优化设计
3. A millimeter-range flexure-based nano-positioning stage using a self-guided displacement amplification mechanism [J] . Jung-Jae Kim, Young-Man Choi, Dahoon Ahn, Mechanism and Machine Theory: Dynamics of Machine Systems Gears and Power Trandmissions Robots and Manipulator Systems Computer-Aided Design Methods . 2012,第Null期

机译：使用自导位移放大机制的毫米范围基于挠曲的纳米定位平台
4. Ultraprecise positioning mechanism with 3-DOF over a one- millimeter stroke using monolithic flexure guide and electromagnetic actuator [C] . S. Fukada, T. Matsuda, Y. Aoyama, International conference of the European Society for Precision Engineering and Nanotechnology . 2013

机译：使用单片弯曲导向器和电磁执行器，通过一毫米冲程与3-DOF的超超声定位机构
5. An Analytical Approach for Synthesizing Line Actuation Spaces of Parallel Flexure Mechanisms [O] . Jingjun Yu, Shouzhong Li, Chen Qiu -1

机译：综合挠曲机构线致动空间的解析方法
6. Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning [O] . Guo, Z., Tian, Yanling, Liu, C., 2015

机译：基于三自由度挠曲的微/纳米定位机构的设计和控制方法
7. Bending Elasticity of Circularly Notched Bars as Monolithic Flexure Hinges in Precision Mechanisms [R] . Tanaka, M., Nakayama, K. 1983

机译：精密机构中圆形缺口钢筋弯曲弹性作为整体弯曲铰链

Ultraprecise positioning mechanism with 3-DOF over a one- millimeter stroke using monolithic flexure guide and electromagnetic actuator

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