首页> 外文会议>IEEE International Conference on Nanotechnology >Fabrication of large-scale suspended graphene clamp-clamp beam by FIB cutting
【24h】

Fabrication of large-scale suspended graphene clamp-clamp beam by FIB cutting

机译:利用FIB切割制造大型悬浮石墨烯钳夹梁

获取原文
获取外文期刊封面目录资料

摘要

In this study, suspended graphene clamp-clamp beam (SGCCB) as long as 100 μm was manufactured by FIB cutting. Large-scale graphene film was grown on Cu foil by CVD and transferred to DRIE defined silicon substrate. The influence of FIB cutting time and ion beam intensity on the pattern profile were investigated with an optimized processing recipe. The SGCCBs revealed a sharp edge, which can be used for gas molecule sensors, resonator and many other fields.
机译:在这项研究中,通过FIB切割制造了长达100μm的悬浮石墨烯钳夹梁(SGCCB)。通过CVD在Cu箔上生长大规模石墨烯膜,并将其转移到DRIE定义的硅衬底上。利用优化的加工配方研究了FIB切割时间和离子束强度对图形轮廓的影响。 SGCCB显示出锋利的边缘,可用于气体分子传感器,共振器和许多其他领域。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号