In this work, we fabricated multilayer type anti-static film including few nano scale thickness of hydrogenated amorphous carbon (DLC) layer and metallic conductive layer, by hybrid coating system which is comprised of linear ion gun and magnetron sputter. Surface resistance can be controllable in the range of 103 ∼ 1010Ω by controlling the thickness. With the benefit of few nano scale coating, this technique can have the maximum processing speed and save raw coating materials, compared to conventional coating method for processing anti-static film. Also discussed are the microstructural aspects of this newly developed anti-static film.
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