Optimization Design of an Electrostatically Suspended Microgyroscope

摘要

A micromachined electrostatically suspendedgyroscope (MESG), with a wheel-like rotor housed by statorelectrodes, using LIGA-type microfabrication technology, waspresented. Based on two capacitive detecting schemes, wherecommon electrodes are used as signal pickoff and excitation,respectively, a unified multi-objective optimization design modelof the structural parameters of the MESG is established.Employing goal attainment method, two optimization designexamples using UV-LIGA and x-LIGA technology are given. Aninitial prototype of the designed microgyroscope was fabricatedusing UV-LIGA technology.