Single-neuron Spinning Control System for a Non-silicon Micromachined Rotational Gyro

摘要

We present here a single-neuron spinning control system (SSCS) for a novel non-silicon rotational MEMS gyro with an electrostatically levitated thick-film Ni rotor. The heavier Ni rotor can provide larger moment of inertia and higher spinning stability than its Si counterpart. With the SSCS, the deficiency of the nonlinear spinning dynamic nature of the gyro can be adaptively tackled. In addition, the SSCS is also able to produce continuously stable torque and keep the steady-state spinning speed robustly constant, which is important for performance improvement of the micromachined MEMS gyro. The SSCS is verified by co-simulations using both the Simulink models and the PSpice driving circuit models, which are joined by the SLPS software interface. The simulation results show that the SSCS can counteract the step disturbance torque 5e-10 N·m that is one order higher than the steady-state electrostatic driving torque, and almost no speed ripple occurs.